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  1. ; ; ( , GOMACTech 2020)
    This work presents a 4-channel, mm-scale, electro-static and piezoelectric actuator driver that uses< 1 µA total quiescent bias current and can drive actuator loads up to 120-330 V at frequencies over 1kHz. The driver achieves over 99% current efficiency and can operate untethered with an integrated photovoltaic array powered by a collimated or diffuse optical power source. The circuit is demonstrated also as a driver for an off-chip boost circuit, generating over 1.5 kV with 85% power efficiency at 45mW load. The system uses a simple 4-bit CMOS logic level interface with 100 kHz clock to actuate high voltage channels; on-chip photovoltaics also power the digital controller, and I/O bus. 
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